Updating process controller based upon fault detection analysis
US6871114B1 · kind B1 · utility
Inventors
Key dates
| Filing date | Aug 30, 2002 |
| Grant date | Mar 22, 2005 |
| Priority date | — |
| Expiry date | Aug 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45031
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating to processing of the workpiece is acquired. The manufacturing data may include metrology data relating to the processed workpiece and/or tool state data relating to the tool state of a processing tool. A metrology/tool state data integration process is performed based upon the acquired manufacturing data. The metrology/tool state data integration process includes performing an assessment of a tool health related to the processing tool and adjusting an emphasis of the metrology data based upon the assessment of the tool health.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.