Reduced splattering of unpassivated laser fuses

US6872648B2 · kind B2 · utility

Assignees

• Infineon Technologies AG · DE
• International Business Machines Corporation · US

Inventors

• Gerald Friese · Munich, DE
• Andy Cowley · Wappingers Falls, US
• Mohammed Fazil Fayaz · Pleasantville, US
• William T. Motsiff · South Burlington, US

Key dates

• Filing date: Sep 19, 2002
• Grant date: Mar 29, 2005
• Expiry date: Sep 19, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The act of blowing an unpassivated electrical fuse (for example, fuse 405) using a laser can result in the splattering of the fuse material and result in electrical short circuits. A blast barrier (for example blast barrier 406) formed around an area of the fuse that is blown by the laser helps to contain the splattering of the fuse material. The blast barrier may be formed from the same material as the fuses themselves and, therefore, can be created in the same fabrication step.