Holder mover for a stage assembly
US6882126B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 29, 2001 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | Nov 29, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23Q1/623
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20). Additionally, the stage assembly (10) can include a fluid connector (94) that connects the device holder (24) in fluid communication with the device table (20).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.