Prioritizing an application of correction in a multi-input control system
US6912436B1 · kind B1 · utility
6Cited by
6References
37Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 30, 2002 |
| Grant date | Jun 28, 2005 |
| Priority date | — |
| Expiry date | Apr 7, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B13/042
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and an apparatus for selectively applying correction to a process control. Manufacturing data relating to the processing of a workpiece is acquired. The manufacturing data includes metrology data relating to the processed workpiece. An adjustment for at least a first or a second control input parameter is determined based upon the manufacturing data. The first and second control input parameters are organized to isolate the first control input parameter from the second control input parameter for adjusting at least one of the first and the second control input parameters, using a controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.