Adaptable electrochemical processing chamber

US6916412B2 · kind B2 · utility

Assignee

• Semitool, Inc. · US

Inventors

• Daniel J. Woodruff · Kalispell, US
• Kyle M. Hanson · Kalispell, US
• Steve Eudy · Kalispell, US
• Curtis Weber · Columbia Falls, US
• Randy Harris · Kalispell, US

Key dates

• Filing date: Jun 5, 2001
• Grant date: Jul 12, 2005
• Expiry date: Feb 7, 2023

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C25D7/123
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

An electrochemical processing chamber which can be modified for treating different workpieces and methods for so modifying electrochemical processing chambers. In one particular embodiment, an electrochemical processing chamber 200 includes a plurality of walls 510 defining a plurality of electrode compartments 520, each electrode compartment having at least one electrode 600 therein, and a virtual electrode unit 530 defining a plurality of flow conduits, with at least one of the flow conduits being in fluid communication with each of the electrode compartments. This first virtual electrode unit 530 may be exchanged for a second virtual electrode unit 540, without modification of any of the electrodes 600, to adapt the processing chamber 200 for treating a different workpiece.