Steve Eudy
12Patents
7h-index
20Co-inventors
58Inventor score
Filing activity: Jul 8, 2000 → Jul 16, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6428673B1 | Apparatus and method for electrochemical processing of a microelectronic workpiece, capable of modifying processing based on metrology | Chemistry; Metallurgy | 56 | Expired |
| US6916412B2 | Adaptable electrochemical processing chamber | Chemistry; Metallurgy | 21 | Expired |
| US6632334B2 | Distributed power supplies for microelectronic workpiece processing tools | Electricity | 20 | Expired |
| US6921467B2 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Electricity | 17 | Expired |
| US7102763B2 | Methods and apparatus for processing microelectronic workpieces using metrology | Electricity | 15 | Expired |
| US6773559B2 | Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece | Chemistry; Metallurgy | 13 | Expired |
| US7161689B2 | Apparatus and method for processing a microelectronic workpiece using metrology | Electricity | 7 | Expired |
| US6747734B1 | Apparatus and method for processing a microelectronic workpiece using metrology | Electricity | 6 | Expired |
| US6962649B2 | Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces | Chemistry; Metallurgy | 5 | Expired |
| US7294243B2 | Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof | Chemistry; Metallurgy | 2 | Expired |
| US7934898B2 | High throughput semiconductor wafer processing | Emerging Cross-Sectional Technologies | 1 | Active |
| US7524406B2 | Processing apparatus including a reactor for electrochemically etching microelectronic workpiece | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.