Process control based on an estimated process result
US6925347B1 · kind B1 · utility
6Cited by
7References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2002 |
| Grant date | Aug 2, 2005 |
| Priority date | — |
| Expiry date | Dec 13, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and apparatus is provided for a process control based on an estimated process result. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and estimating at least one process result of the workpiece based on at least a portion of the received trace data. The method further comprises adjusting processing of a next workpiece based on the estimated at least one process result.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.