Method and system for improving the efficiency of a mechanical alignment tool

US6946411B2 · kind B2 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Uwe Knappe · Senftenberg - Zły Komorow, DE
• Jan Raebiger · Dresden, DE
• Uwe Schulze · Dresden, DE
• Rolf Seltmann · Dresden, DE

Key dates

• Filing date: Jul 17, 2003
• Grant date: Sep 20, 2005
• Expiry date: Jan 29, 2024

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S438/907
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A technique is disclosed that allows alignment of substrates on a run-to-run basis by using the position data of one or more previously aligned substrates to determine a setpoint of a pre-alignment process for one or more subsequent substrates. The setpoint may also be determined on the basis of a predefined characteristic of the substrates to be aligned.