Patent · US Expired

Semiconductor structure and methods for fabricating same

US6955971B2 · kind B2 · utility

69Cited by
13References
39Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 12, 2003
Grant dateOct 18, 2005
Priority date
Expiry dateNov 12, 2023

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S438/981
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor structure and methods for fabricating are disclosed. In an implementation, a method of fabricating a semiconductor structure includes forming a first semiconductor material substrate with a first dielectric area having a first thickness and a second dielectric area having a second thickness, bonding the first substrate to a second semiconductor substrate, and thinning at least one of the first and second substrates. The invention also pertains to a semiconductor structure. The structure includes a semiconductor substrate having a surface layer of semiconductor material, a first dielectric layer of a first dielectric material buried under the surface layer, and a second dielectric layer buried under the surface layer. In an embodiment, the thickness of the first dielectric layer is different than the thickness of the second dielectric layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.