Charged particle beam apparatus and charged particle beam irradiation method
US6956211B2 · kind B2 · utility
8Cited by
12References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2003 |
| Grant date | Oct 18, 2005 |
| Priority date | — |
| Expiry date | Sep 8, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.