Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing
US6968303B1 · kind B1 · utility
4Cited by
3References
40Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 13, 2000 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | Nov 6, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/0227
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method is provided for configuring a final data set to use for modeling a manufacturing process, the method including requesting a real-time data set from a real-time database, requesting an historical data set from an historical database, and defining a required format for the final data set. The method also includes combining the real-time data set from the real-time database with the historical data set from the historical database using the required format for the final data set.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.