Patent · US Expired

Apparatus for the automated testing, calibration and characterization of test adapters

US6970006B2 · kind B2 · utility

3Cited by

15References

1Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Stephan Appen · Birkenfeld, DE
Michael Hübner · Weinheim, DE
Michael Kund · Bad Aibling, DE

Key dates

Filing date	Oct 14, 2004
Grant date	Nov 29, 2005
Priority date	—
Expiry date	Oct 14, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2887
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The apparatus enables the automated testing, calibration and characterization of test adapters for semiconductor devices. A holder for the test adapter can be rotated in a defined manner. At least one probe head is provided which can be adjusted radially with respect to the holder. The probe head has two or more contact pins whose spacing distance is adjustable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.