Fault detection spanning multiple processes
US6991945B1 · kind B1 · utility
6Cited by
1References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2002 |
| Grant date | Jan 31, 2006 |
| Priority date | — |
| Expiry date | Dec 12, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus is provided for fault detection spanning multiple processes. The method comprises receiving operational data associated with a first process, receiving operational data associated with a second process, which is downstream to the first process and performing fault detection analysis based on the operational data associated with the first process and second process using a common fault detection unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.