Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency
US6995067B2 · kind B2 · utility
5Cited by
30References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2003 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Feb 9, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.