Particle detector suitable for detecting ions and electrons
US7009187B2 · kind B2 · utility
17Cited by
10References
21Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 26, 2003 |
| Grant date | Mar 7, 2006 |
| Priority date | — |
| Expiry date | Jun 26, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A particle detector switchable from an ion detector to an electron detector includes an ion-to-electron converter and a scintillator detector. With one set of voltages on the components, the converter has minimal impact on the electron trajectories so the electrons are efficiently detected by the scintillator detector. With different voltage settings on the components, the detector can be operated in positive ion mode to collect positive ions with adequate efficiency for most FIB applications. The ion-to-electron converter is preferably in the shape of a cylinder or includes multiple parallel plates
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.