Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm

US7015489B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Wolfgang Singer · Aalen, DE
• Wilhelm Egle · Aalen, DE
• Markus Weiss · Aalen, DE
• Joachim Hainz · Aalen, DE
• Jochen Wietzorrek · Aalen, DE
• Frank Melzer · Utzmemmingen, DE
• Johannes Wangler · Oberkochen, DE

Key dates

• Filing date: Jul 23, 2003
• Grant date: Mar 21, 2006
• Expiry date: Jul 23, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K2201/067
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.