Slot array antenna and plasma processing apparatus
US7023393B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 28, 2003 |
| Grant date | Apr 4, 2006 |
| Priority date | — |
| Expiry date | May 12, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01Q21/005
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A slot array antenna, consistent with the invention can include a power feeding waveguide for feeding microwave power and a plurality of rectangular radiating waveguides. The plurality of rectangular radiating waveguides are connected to a plurality of windows which are disposed along the longitudinal direction of the power feeding waveguide so as to guide the microwave power from the plurality of windows to the outside of the antenna. In each of the radiating waveguides, the interval “d” between the centers of gravity of slot pairs or slots is substantially the same as the wavelength λm of the microwave in the rectangular radiating waveguide. A slot array antenna of the present invention can be used in a plasma processing apparatus to increase the plasma density in the plasma-processing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.