Makoto Ando
11Patents
0Active
11Granted
30Portfolio score
Filing activity: May 24, 1996 → Oct 28, 2003
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5698036A | Plasma processing apparatus | Electricity | 414 | Expired |
| US6528752B1 | Plasma processing apparatus and plasma processing method | Electricity | 363 | Expired |
| US7243610B2 | Plasma device and plasma generating method | Electricity | 224 | Expired |
| US6622650B2 | Plasma processing apparatus | Electricity | 15 | Expired |
| US6796268B2 | Microwave plasma processing system | Electricity | 11 | Expired |
| US6646224B2 | Plasma-assisted processing system and plasma-assisted processing method | Electricity | 9 | Expired |
| US6322662A | Plasma treatment system | Electricity | 7 | Expired |
| US7023393B2 | Slot array antenna and plasma processing apparatus | Electricity | 4 | Expired |
| US6527909B2 | Plasma processing apparatus | Electricity | 2 | Expired |
| US6967622B2 | Plasma device and plasma generating method | Electricity | 1 | Expired |
| US6911617B2 | Plasma device and plasma generating method | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.