Scanning electron microscope with measurement function
US7053371B2 · kind B2 · utility
6Cited by
3References
5Claims
0Family size
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Key dates
| Filing date | Feb 18, 2004 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Feb 18, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.