In-situ metalization monitoring using eddy current measurements during the process for removing the film
US7070476B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2005 |
| Grant date | Jul 4, 2006 |
| Priority date | — |
| Expiry date | Apr 26, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/72
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.