Angle resolved x-ray detection
US7075073B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 21, 2004 |
| Grant date | Jul 11, 2006 |
| Priority date | — |
| Expiry date | Oct 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for detecting properties of a sample. An electron beam generator produces an electron beam and directs the electron beam at a desired point on the sample. The sample thereby emits characteristic x-rays at takeoff angles. A collimator receives and parallelizes the x-rays and converts the takeoff angles of the x-rays to positional differences between the parallelized x-rays. A diffractor receives and deflects the x-rays. A position sensitive detector receives the deflected x-rays and detects the positional differences between the x-rays, and generates signals that are characteristic of the received x-rays. An analyzer receives the signals from the detector and determines the properties of the sample based at least in part on the positional differences between the x-rays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.