Device for holding a beam splitter element

US7079331B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Ulrich Weber · Ulm, DE
• Alexander Kohl · Aalen, DE
• Hubert Holderer · Oberkochen, DE
• Armin Schoeppach · Aalen, DE
• Erwin Gaber · Heidenheim, DE
• Winfried Kaiser · Cologne, DE
• Reiner Garreis · Aalen, DE
• Toralf Gruner · Hennef (Sieg), DE
• Chris Reed · Reno, US
• Dragos Pariza · Stamford, US
• Mike Meehan · Southbury, US

Key dates

• Filing date: Apr 19, 2005
• Grant date: Jul 18, 2006
• Expiry date: Apr 19, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70891
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.