Facet mirror having a number of mirror facets

US7090362B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Hubert Holderer · Oberkochen, DE
• Andreas Heisler · Steinheim, DE
• Wolfgang Singer · Aalen, DE
• Markus Weiss · Aalen, DE
• Andreas Seifert · Aalen, DE
• Frank Melzer · Utzmemmingen, DE
• Heinz Mann · Aalen, DE

Key dates

• Filing date: May 7, 2004
• Grant date: Aug 15, 2006
• Expiry date: May 7, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70275
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.