Determining transmission of error effects for improving parametric performance
US7117062B1 · kind B1 · utility
2Cited by
3References
33Claims
0Family size
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Key dates
| Filing date | Dec 18, 2002 |
| Grant date | Oct 3, 2006 |
| Priority date | — |
| Expiry date | Mar 3, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and an apparatus for characterizing an uncertainty factor relating to processing workpieces. A first processing step is performed upon a workpiece. A first uncertainty factor associated with the first processing step is calculated. A final uncertainty factor associated with an end-of-line parameter relating to the workpiece is calculated based upon the first uncertainty factor. A process control function based upon the final uncertainty factor is performed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.