Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes
US7129440B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2005 |
| Grant date | Oct 31, 2006 |
| Priority date | — |
| Expiry date | Jul 20, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/0068
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatus for thermally processing a semiconductor wafer includes an array of semiconductor laser emitters arranged in plural parallel rows extending along a slow axis, plural respective cylindrical lenses overlying respective ones of the rows of laser emitters for collimating light from the respective rows along a fast axis generally perpendicular to the slow axis, a homogenizing light pipe having an input face at a first end for receiving light from the plural cylindrical lenses and an output face at an opposite end, the light pipe comprising a pair of reflective walls extending between the input and output faces and separated from one another along the direction of the slow axis, and scanning apparatus for scanning light emitted from the homogenizing light pipe across the wafer in a scanning direction parallel to the fast axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.