Bruce E. Adams
76Patents
17h-index
45Co-inventors
84Inventor score
Filing activity: Jul 6, 1978 → Sep 28, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5154512A | Non-contact techniques for measuring temperature or radiation-heated objects | Physics | 84 | Expired |
| US5166080A | Techniques for measuring the thickness of a film formed on a substrate | Physics | 67 | Expired |
| US5183338A | Temperature measurement with combined photo-luminescent and black body sensing techniques | Physics | 64 | Expired |
| US5490728A | Non-contact optical techniques for measuring surface conditions | Physics | 63 | Expired |
| US5364186A | Apparatus and method for monitoring a temperature using a thermally fused composite ceramic blackbody temperature probe | Physics | 48 | Expired |
| US8222574B2 | Temperature measurement and control of wafer support in thermal processing chamber | Electricity | 46 | Active |
| US5310260A | Non-contact optical techniques for measuring surface conditions | Physics | 43 | Expired |
| US5769540A | Non-contact optical techniques for measuring surface conditions | Physics | 39 | Expired |
| US6183130A | Apparatus for substrate temperature measurement using a reflecting cavity and detector | Physics | 32 | Expired |
| US7279721B2 | Dual wavelength thermal flux laser anneal | Electricity | 32 | Expired |
| US8148663B2 | Apparatus and method of improving beam shaping and beam homogenization | Performing Operations; Transporting | 32 | Active |
| US6839507B2 | Black reflector plate | Electricity | 30 | Expired |
| US7135392B1 | Thermal flux laser annealing for ion implantation of semiconductor P-N junctions | Electricity | 26 | Expired |
| US5318362A | Non-contact techniques for measuring temperature of radiation-heated objects | Physics | 24 | Expired |
| US7860379B2 | Temperature measurement and control of wafer support in thermal processing chamber | Electricity | 20 | Active |
| US5112137A | Temperature measurement with combined photo-luminescent and black body sensing techniques | Physics | 19 | Expired |
| US7595208B2 | Method of laser annealing using two wavelengths of radiation | Electricity | 19 | Active |
| US6406179B2 | Sensor for measuring a substrate temperature | Physics | 17 | Expired |
| US7494272B2 | Dynamic surface annealing using addressable laser array with pyrometry feedback | Electricity | 17 | Active |
| US8829392B2 | Apparatus and method of improving beam shaping and beam homogenization | Performing Operations; Transporting | 15 | Active |
| US7129440B2 | Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes | Physics | 13 | Expired |
| US7398693B2 | Adaptive control method for rapid thermal processing of a substrate | Electricity | 11 | Active |
| US8367983B2 | Apparatus including heating source reflective filter for pyrometry | Electricity | 9 | Active |
| US4145479A | Heat resistant curable surface coating composition comprising the reaction product of an unsaturated polyaryloxyphosphazene and an unsaturated aryloxycyclotriphosphazene | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7795816B2 | High speed phase scrambling of a coherent beam using plasma | Electricity | 7 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.