Projection objective having adjacently mounted aspheric lens surfaces

US7154678B2 · kind B2 · utility

Assignee

• Carl Zeiss Semiconductor Manufacturing Technologies AG · DE

Inventors

• Karl-Heinz Schuster · Oberkochen, DE
• David Shafer · Fairfield, US
• Wilhelm Ulrich · Aalen, DE
• Helmut Beierl · Heidenheim, DE
• Wolfgang Singer · Aalen, DE

Key dates

• Filing date: Mar 15, 2005
• Grant date: Dec 26, 2006
• Expiry date: Mar 15, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70933
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A projection objective has at least five lens groups (G1 to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.