Closed loop control on liquid delivery system ECP slim cell
US7155319B2 · kind B2 · utility
13Cited by
34References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2005 |
| Grant date | Dec 26, 2006 |
| Priority date | — |
| Expiry date | Aug 15, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0363
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO) signal based on a setpoint and a deadband. The setpoint is a target value of the process variable and the deadband is an allowable tolerance around the setpoint that determines when the control logic is activated to control the process variable. The method further includes transmitting the AO signal to a control device and adjusting the process variable proportional to the value of the AO signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.