System and method for visually monitoring a semiconductor processing system
US7173648B1 · kind B1 · utility
5Cited by
19References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2000 |
| Grant date | Feb 6, 2007 |
| Priority date | — |
| Expiry date | Apr 21, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/889
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to visually monitoring an interior portion of a processing chamber in a semiconductor processing system. An image collector collects images of the interior of the chamber and provides an image signal indicative of a visual representation of the interior of the chamber. A viewing station receives the image signal and displays a visual representation of the interior of the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.