Chuck with integrated wafer support
US7187188B2 · kind B2 · utility
85Cited by
498References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2004 |
| Grant date | Mar 6, 2007 |
| Priority date | — |
| Expiry date | Aug 26, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved chuck with lift pins within a probe station.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.