Selection of wavelengths for integrated circuit optical metrology
US7216045B2 · kind B2 · utility
12Cited by
21References
2Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 3, 2002 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | May 6, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.