Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces
US7247223B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2003 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | May 6, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D17/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus for processing a microfeature workpiece. In one embodiment, the apparatus includes a support member configured to carry a microfeature workpiece at a workpiece plane, and a vessel positioned at least proximate to the support member. The vessel has a vessel surface facing toward the support member and positioned to carry a processing liquid. The vessel surface is shaped to provide an at least approximately uniform current density at the workpiece plane. At least one electrode, such as a thieving electrode, is disposed within the vessel. In a further aspect of this embodiment, the thieving electrode can be easily removable along with conductive material it attracts from the processing liquid. The shape of the vessel surface, the current supplied to the thieving electrode and/or the diameter of an aperture upstream of the workpiece are changed dynamically in other embodiments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.