Carrier head vibration damping
US7255637B2 · kind B2 · utility
3Cited by
81References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2001 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | Dec 3, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier head for chemical mechanical polishing that has a base having at least a portion formed of a polymer, a mounting assembly connected to the base having a surface for contacting a substrate, a retainer secured to the portion of the base to prevent the substrate from moving along the surface, and a dampening material secured between the retainer and the base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.