Doyle E. Bennett
38Patents
12h-index
50Co-inventors
84Inventor score
Filing activity: Jan 6, 1998 → Sep 21, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5984769A | Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus | Performing Operations; Transporting | 99 | Expired |
| US6273806A | Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus | Performing Operations; Transporting | 73 | Expired |
| US6645061B1 | Polishing pad having a grooved pattern for use in chemical mechanical polishing | Performing Operations; Transporting | 49 | Expired |
| US7074109B1 | Chemical mechanical polishing control system and method | Electricity | 28 | Expired |
| US6135868A | Groove cleaning device for chemical-mechanical polishing | Performing Operations; Transporting | 28 | Expired |
| US7024268B1 | Feedback controlled polishing processes | Emerging Cross-Sectional Technologies | 20 | Expired |
| US8408965B2 | Eddy current gain compensation | Physics | 16 | Active |
| US6220941A | Method of post CMP defect stability improvement | Performing Operations; Transporting | 16 | Expired |
| US7247080B1 | Feedback controlled polishing processes | Emerging Cross-Sectional Technologies | 16 | Expired |
| US9281253B2 | Determination of gain for eddy current sensor | Electricity | 15 | Active |
| US6945845B2 | Chemical mechanical polishing apparatus with non-conductive elements | Performing Operations; Transporting | 14 | Expired |
| US6371836B1 | Groove cleaning device for chemical-mechanical polishing | Performing Operations; Transporting | 13 | Expired |
| US6572453B1 | Multi-fluid polishing process | Chemistry; Metallurgy | 12 | Expired |
| US6251001A | Substrate polishing with reduced contamination | Performing Operations; Transporting | 9 | Expired |
| US8393940B2 | Molding windows in thin pads | Performing Operations; Transporting | 8 | Active |
| US9636797B2 | Adjusting eddy current measurements | Performing Operations; Transporting | 8 | Active |
| US7621798B1 | Reducing polishing pad deformation | Performing Operations; Transporting | 7 | Active |
| US6991516B1 | Chemical mechanical polishing with multi-stage monitoring of metal clearing | Performing Operations; Transporting | 7 | Expired |
| US9227293B2 | Multi-platen multi-head polishing architecture | Performing Operations; Transporting | 7 | Active |
| US8157614B2 | Method of making and apparatus having windowless polishing pad and protected fiber | Performing Operations; Transporting | 6 | Active |
| US9205527B2 | In-situ monitoring system with monitoring of elongated region | Performing Operations; Transporting | 4 | Active |
| US7354334B1 | Reducing polishing pad deformation | Performing Operations; Transporting | 4 | Expired |
| US7255637B2 | Carrier head vibration damping | Performing Operations; Transporting | 3 | Expired |
| US9056383B2 | Path for probe of spectrographic metrology system | Performing Operations; Transporting | 2 | Active |
| US7494929B2 | Automatic gain control | Performing Operations; Transporting | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.