Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
US7277171B1 · kind B1 · utility
12Cited by
27References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2005 |
| Grant date | Oct 2, 2007 |
| Priority date | — |
| Expiry date | Mar 31, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0693
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substantially self-contained “on-board” material system investigation system functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a large sample, including the capability to easily and conveniently change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.