Optical system operating with variable angle of incidence
US7292341B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 8, 2003 |
| Grant date | Nov 6, 2007 |
| Priority date | — |
| Expiry date | Feb 4, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/55
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical system for use in measurements in a sample comprising a light source (102) operable to produce an incident light beam propagating in a certain direction towards the sample (S) through an illumination channel (IC), a detector unit (104) for collecting light coming from the sample through a detection channel (DC), and generating data indicative of the collected light, a light directing assembly (106) operable to direct the incident beam onto a certain location on the sample's plane with a plurality of incident angles, and to direct light returned from the illuminated location to the detector unit (104), the light directing assembly (106) comprising a plurality of beam deflector elements (108 A-D), at least one of the deflector elements being movable and position of said at least one movable deflector element defining one of the selected incident angles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.