Inventor · Rehovot, IL

Boaz Brill

40Patents
10h-index
13Co-inventors
72Inventor score

Filing activity: Jun 4, 1992 → Nov 2, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US6657736B1 Method and system for measuring patterned structures Physics 100 Expired
US6974962B2 Lateral shift measurement using an optical technique Electricity 70 Expired
US6704920B2 Process control for micro-lithography Electricity 61 Expired
US5233903A Gun with combined operation by chemical propellant and plasma Mechanical Engineering; Lighting; Heating 29 Expired
US6650424B2 Method and system for measuring in patterned structures Electricity 27 Expired
US7292341B2 Optical system operating with variable angle of incidence Physics 23 Expired
US8488128B2 Line edge roughness measuring technique and test structure Physics 19 Active
US7477405B2 Method and system for measuring patterned structures Physics 13 Expired
US8289515B2 Method and system for use in monitoring properties of patterned structures Physics 10 Active
US7184152B2 Optical measurements of line edge roughness Physics 10 Expired
US7715007B2 Lateral shift measurement using an optical technique Electricity 8 Active
US8848185B2 Optical system and method for measuring in three-dimensional structures Electricity 8 Active
US7495782B2 Method and system for measuring patterned structures Physics 8 Active
US7301163B2 Lateral shift measurement using an optical technique Electricity 6 Active
US7760368B2 Method and system for measuring patterned structures Physics 5 Active
US8531678B2 Method and system for measuring patterned structures Electricity 5 Active
US7626710B2 Method and system for measuring patterned structures Physics 5 Active
US8023122B2 Method and system for measuring patterned structures Physics 4 Active
US7292335B2 Optical measurements of patterned structures Physics 4 Expired
US7864344B1 Method and system for measuring patterned structures Physics 3 Active
US7122817B2 Lateral shift measurement using an optical technique Electricity 3 Expired
US7791740B2 Method and system for measuring patterned structures Physics 3 Active
US7626711B2 Method and system for measuring patterned structures Physics 3 Active
US10575765B2 Analyte-sensing device Physics 3 Active
US8363219B2 Lateral shift measurement using an optical technique Electricity 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.