Reduction of subsurface damage in the production of bulk SiC crystals
US7300519B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2004 |
| Grant date | Nov 27, 2007 |
| Priority date | — |
| Expiry date | Nov 17, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B23/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention is an improvement in a method of producing a high quality bulk single crystal of silicon carbide in a seeded sublimation system. The improvement includes etching the front face on each of a first and second SiC seed to a depth of greater than about 20 μm while protecting the opposite or back face on each of the first and second SiC seeds. Protection of the front faces occurs by placing the faces sufficiently close to one another to shield the back faces from being etched during etching of the respective unprotected front faces. Separation of the first and second SiC seeds occurs after the etching of the front faces is complete.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.