Inspection method and inspection apparatus
US7304489B2 · kind B2 · utility
0Cited by
18References
6Claims
0Family size
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Key dates
| Filing date | May 2, 2006 |
| Grant date | Dec 4, 2007 |
| Priority date | — |
| Expiry date | Jun 22, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.