In-plane mechanically coupled microelectromechanical tuning fork resonators
US7319372B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 15, 2005 |
| Grant date | Jan 15, 2008 |
| Priority date | — |
| Expiry date | Mar 6, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for example, 2 or 4 resonators) that are mechanically coupled to provide, for example, a differential signal output. In one embodiment, the present invention includes four commonly shaped microelectromechanical tuning fork resonators (for example, tuning fork resonators having two or more rectangular-shaped or square-shaped tines). Each resonator is mechanically coupled to another resonator of the architecture. For example, each resonator of the architecture is mechanically coupled to another one of the resonators on one side or a corner of one of the sides. In this way, all of the resonators, when induced, vibrate at the same frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.