Methods and systems for optical inspection of surfaces based on laser screening
US7342218B2 · kind B2 · utility
1Cited by
17References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2002 |
| Grant date | Mar 11, 2008 |
| Priority date | — |
| Expiry date | Mar 5, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.