Method of measuring three-dimensional surface roughness of a structure
US7348556B2 · kind B2 · utility
35Cited by
3References
24Claims
0Family size
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Key dates
| Filing date | Oct 17, 2005 |
| Grant date | Mar 25, 2008 |
| Priority date | — |
| Expiry date | Aug 29, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2251
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved method of measuring the three-dimensional surface roughness of a structure. A focused ion beam is used to mill a succession of cross-sections or “slices” of the feature of interest at pre-selected intervals over a pre-selected measurement distance. As each cross-section is exposed, a scanning electron microscope is used to measure the relevant dimensions of the feature. Data from these successive “slices” is then used to determine the three-dimensional surface roughness for the feature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.