Scanning transmission electron microscope and scanning transmission electron microscopy
US7372029B2 · kind B2 · utility
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Key dates
| Filing date | May 30, 2007 |
| Grant date | May 13, 2008 |
| Priority date | — |
| Expiry date | May 30, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.