Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same
US7381519B2 · kind B2 · utility
2Cited by
3References
22Claims
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Key dates
| Filing date | Jun 22, 2005 |
| Grant date | Jun 3, 2008 |
| Priority date | — |
| Expiry date | Aug 3, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0046
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Disclosed herein is a top anti-reflective coating polymer and its composition comprising the same represented by Formula 1 below:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.