Proximity meniscus manifold

US7389783B2 · kind B2 · utility

Assignee

• Lam Research Corporation · US

Inventors

• Carl Woods · Capitola, US
• Michael G. R. Smith · West Linn, US
• John Parks · Hercules, US
• James P. Garcia · Santa Clara, US
• John M. de Larios · Palo Alto, US

Key dates

• Filing date: Apr 1, 2004
• Grant date: Jun 24, 2008
• Expiry date: Jan 31, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S134/902
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An apparatus for processing a substrate is provided which includes a first manifold module to generate a fluid meniscus on a substrate surface. The apparatus also includes a second manifold module to connect with the first manifold module and also to move the first manifold module into close proximity to the substrate surface to generate the fluid meniscus.