Carl Woods
40Patents
7h-index
29Co-inventors
65Inventor score
Filing activity: Jun 28, 2002 → Sep 18, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6988327B2 | Methods and systems for processing a substrate using a dynamic liquid meniscus | Emerging Cross-Sectional Technologies | 110 | Expired |
| US7069937B2 | Vertical proximity processor | Emerging Cross-Sectional Technologies | 36 | Expired |
| US7234477B2 | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces | Emerging Cross-Sectional Technologies | 35 | Expired |
| US7000622B2 | Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus | Emerging Cross-Sectional Technologies | 30 | Expired |
| US7198055B2 | Meniscus, vacuum, IPA vapor, drying manifold | Emerging Cross-Sectional Technologies | 28 | Expired |
| US7389783B2 | Proximity meniscus manifold | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7513262B2 | Substrate meniscus interface and methods for operation | Emerging Cross-Sectional Technologies | 11 | Expired |
| US7811424B1 | Reducing mechanical resonance and improved distribution of fluids in small volume processing of semiconductor materials | Chemistry; Metallurgy | 7 | Active |
| US7350316B2 | Meniscus proximity system for cleaning semiconductor substrate surfaces | Emerging Cross-Sectional Technologies | 6 | Active |
| US7240679B2 | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7350315B2 | Edge wheel dry manifold | Electricity | 5 | Expired |
| US7127831B2 | Methods and systems for processing a substrate using a dynamic liquid meniscus | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6702202B1 | Method and apparatus for fluid delivery to a backside of a substrate | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6729339B1 | Method and apparatus for cooling a resonator of a megasonic transducer | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7293571B2 | Substrate proximity processing housing and insert for generating a fluid meniscus | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7913703B1 | Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate | Emerging Cross-Sectional Technologies | 3 | Active |
| US9117860B2 | Controlled ambient system for interface engineering | Electricity | 3 | Active |
| US7395611B2 | System processing a substrate using dynamic liquid meniscus | Emerging Cross-Sectional Technologies | 3 | Active |
| US7387689B2 | Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces | Emerging Cross-Sectional Technologies | 3 | Active |
| US7811423B2 | Proximity processing using controlled batch volume with an integrated proximity head | Electricity | 3 | Active |
| US7862693B2 | Apparatus for plating semiconductor wafers | Electricity | 2 | Active |
| US7464719B2 | Multi-menisci processing apparatus | Emerging Cross-Sectional Technologies | 2 | Active |
| US7406972B2 | Substrate proximity processing structures | Emerging Cross-Sectional Technologies | 1 | Active |
| US7128279B2 | Method and apparatus for fluid delivery to a backside of a substrate | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7722724B2 | Methods for substrate processing in cluster tool configurations having meniscus application systems | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.