Collector configured of mirror shells

US7460212B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Wolfgang Singer · Aalen, DE
• Wilhelm Egle · Aalen, DE
• Markus Weiss · Aalen, DE
• Joachim Hainz · Aalen, DE
• Jochen Wietzorrek · Aalen, DE
• Frank Melzer · Utzmemmingen, DE
• Johannes Wangler · Oberkochen, DE

Key dates

• Filing date: Jul 3, 2007
• Grant date: Dec 2, 2008
• Expiry date: Jul 3, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K2201/067
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.