Spot grid array scanning system
US7468506B2 · kind B2 · utility
53Cited by
17References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2006 |
| Grant date | Dec 23, 2008 |
| Priority date | — |
| Expiry date | Jan 21, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70358
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.