Gas discharge laser output light beam parameter control
US7471708B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2005 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Apr 25, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/09702
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A line narrowed gas discharge laser system and method of operation are disclosed which may comprise: an oscillator cavity; a laser chamber comprising a chamber housing containing a lasing medium gas; at least one peaking capacitor electrically connected to the chamber housing and to a first one of a pair of electrodes; a second one of the pair of electrodes connected to an opposite terminal of the at least one peaking capacitor; a current return path connected to the chamber housing; the one terminal, the first one of the electrodes, the lasing medium gas, the second one of the electrodes, the current return path and the second terminal forming a head current inductive loop having an inductance unique to the particular head current inductive loop; a spectral quality tuning mechanism comprising a mechanism for changing the particular head current inductive loop inductance value for the particular head current inductance loop.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.