Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination

US7473907B2 · kind B2 · utility

Assignees

• Carl Zeiss SMT GmbH · DE
• ASML NETHERLANDS B.V. · NL

Inventors

• Wolfgang Singer · Aalen, DE
• Martin Antoni · Aalen, DE
• Johannes Wangler · Oberkochen, DE
• Markus Weiss · Aalen, DE
• Vadim Yevgenyevich Banine · Deurne, NL
• Marcel Mathijs Theodore Marie Dierichs · Venlo, NL
• Roel Moors · Helmond, NL
• Karl-Heinz Schuster · Oberkochen, DE
• Axel Scholz · Aalen, DE
• Philipp Bosselmann · Frankfurt, DE
• Bernd Warm · Arnstorf, DE

Key dates

• Filing date: Mar 28, 2005
• Grant date: Jan 6, 2009
• Expiry date: Jun 5, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70558
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

There is provided an illumination system that includes (a) a light source that emits light having a wavelength ≦193 nm, where the light provides a predetermined illumination in a plane distant from the light source and defines a used area in the plane, and (b) a sensor, situated in or near the plane, for detecting light outside the used area.